Ozone Sensors Working at Room Temperature Using Zinc Oxide Nanocrystals Annealed at Low Temperature

We focus on ozone (O3) detection at ambient temperature by Zinc Oxide (ZnO) nanoparticles (NPs) deposited on Si/SiO2 by spin coating from colloidal solutions as sensitive layers for air quality monitoring. We establish that at room temperature using continuous Ultra-Violet (UV) light irradiation enhances the sensing responses. Three annealing temperatures of ZnO films were performed to compare the sensing properties. These sensors present repeatable responses towards O3 with fast responses for concentrations as low as 35 ppb with processes compatible with most of flexible substrates.

Mots clés

ZnO nanoparticles environment ozone gas room-temperature UV-photoactivated

Domaines

Micro et nanotechnologies/Microélectronique

Fichier principal

2017 Bernardini ZnO UV.pdf (563.02 Ko)

Origine	Fichiers éditeurs autorisés sur une archive ouverte

Sandrine Bernardini : Connectez-vous pour contacter le contributeur

https://amu.hal.science/hal-01631576

Soumis le : vendredi 10 novembre 2017-13:38:56

Dernière modification le : lundi 10 juin 2024-16:58:03

Archivage à long terme le : dimanche 11 février 2018-13:20:40

Dates et versions

hal-01631576 , version 1 (10-11-2017)

Identifiants

HAL Id : hal-01631576 , version 1
DOI : 10.3390/proceedings1040423

Citer

Sandrine Bernardini, Mohamed Hameda Benchekroun, Tomas Fiorido, Khalifa Aguir, Marc Bendahan, et al.. Ozone Sensors Working at Room Temperature Using Zinc Oxide Nanocrystals Annealed at Low Temperature. Eurosensors XXXI confrence, Sep 2017, Paris, France. pp.3 - 6, ⟨10.3390/proceedings1040423⟩. ⟨hal-01631576⟩

Exporter

BibTeX XML-TEI Dublin Core DC Terms EndNote DataCite

Collections

UNIV-TLN CNRS UNIV-AMU UNIV-LYON1 LMI IM2NP INC-CNRS CINAM UDL

411 Consultations

130 Téléchargements