PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects - Aix-Marseille Université Access content directly
Journal Articles Scripta Materialia Year : 2018
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hal-02381663 , version 1 (26-11-2019)

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T. Luo, J. Perrin Toinin, M. Descoins, K. Hoummada, M. Bertoglio, et al.. PdGe contact fabrication on Ga-doped Ge: Influence of implantation-mediated defects. Scripta Materialia, 2018, 150, pp.66-69. ⟨10.1016/j.scriptamat.2018.02.037⟩. ⟨hal-02381663⟩
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