Fabrication of Si-based dielectric resonators: Combining etaloning with Mie resonances - Aix-Marseille Université Access content directly
Journal Articles Optics Express Year : 2020

Fabrication of Si-based dielectric resonators: Combining etaloning with Mie resonances

Mohammed Bouabdellaoui
  • Function : Author
Nicoletta Granchi
  • Function : Author
Jean-Benoit Claude
  • Function : Author
Abdenacer Benali
  • Function : Author
Isabelle Berbezier
  • Function : Author
Drisse Hannani
  • Function : Author
Antoine Ronda
  • Function : Author
Marco Salvalaglio
  • Function : Author
Axel Voigt
  • Function : Author
Jerome Wenger
  • Function : Author
Monica Bollani
  • Function : Author
Massimo Gurioli
Stefano Sanguinetti
  • Function : Author
Francesca Intonti
  • Function : Author
  • PersonId : 1113123
Marco Abbarchi


We use low-resolution optical lithography and plasma etching joined with solid state dewetting of crystalline, ultra-thin silicon on insulator (c-UT-SOI) to form monocrystalline, atomically-smooth, silicon-based Mie resonators in well controlled large periodic arrays. The dewetted islands have a typical size in the 100 nm range, about one order of magnitude smaller than the etching resolution. Exploiting a 2 m thick SiO 2 layer separating the islands and the underlying bulk, silicon wafer, we combine the resonant modes of the antennas with the etalon effect. This approach sets the resonance spectral position, improves the structural colorization and the contrast between scattering maxima and minima of individual resonant antennas. Our results demonstrate that templated dewetting enables to form defect-free, faceted islands that are much smaller than the nominal etching resolution and that an appropriate engineering of the substrate improves their scattering properties. These results are relevant to applications in spectral filtering, structural color and beam steering with all-dielectric photonic devices.
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Dates and versions

hal-03374735 , version 1 (12-10-2021)



Dimosthenhs Toliopoulos, Mario Khoury, Mohammed Bouabdellaoui, Nicoletta Granchi, Jean-Benoit Claude, et al.. Fabrication of Si-based dielectric resonators: Combining etaloning with Mie resonances. Optics Express, 2020, 28 (25), ⟨10.1364/OE.409001⟩. ⟨hal-03374735⟩
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