3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines - Aix-Marseille Université Access content directly
Conference Papers Year : 2016

3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines

A. Fraczkiewicz
  • Function : Author
E. Capria
  • Function : Author
G. Chahine
  • Function : Author
P. Cloetens
  • Function : Author
J. Da Silva
  • Function : Author
A. Jouve
  • Function : Author
F. Lorut
  • Function : Author
S. Lhostis
  • Function : Author
P. Bleuet
  • Function : Author
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Dates and versions

hal-01453356 , version 1 (02-02-2017)

Identifiers

  • HAL Id : hal-01453356 , version 1

Cite

A. Fraczkiewicz, E. Capria, G. Chahine, P. Cloetens, J. Da Silva, et al.. 3D morphological and structural nano-characterization for microelectronics: the potential of recent, long synchrotron beamlines. X-Ray Microscopy Conference (XRM 2016), Aug 2016, Oxford, United Kingdom. ⟨hal-01453356⟩
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