In Situ X-ray Studies of Crystalline Texture and Strain During the Initial Stages of ZnO Atomic Layer Deposition
R. Boichot
,
L. Tian
,
A. Claudel
,
E. Skopin
,
M.I. Richard
(1)
,
A. Crisci
,
A. Chaker
,
V. Cantelli
,
S. Coindeau
,
S. Lay
,
T. Ouled
,
C. Guichet
,
M. H. Chu
,
N. Aubert
,
G. Ciatto
,
E. Blanquet
,
O. Thomas
(1)
,
J.L. Deschanvres
,
D. D. Fong
,
Hubert Renevier
R. Boichot
- Function : Author
L. Tian
- Function : Author
A. Claudel
- Function : Author
E. Skopin
- Function : Author
M.I. Richard
- Function : Author
- PersonId : 736272
- IdHAL : marie-ingrid-richard
- ORCID : 0000-0002-8172-3141
- IdRef : 130070289
A. Crisci
- Function : Author
A. Chaker
- Function : Author
V. Cantelli
- Function : Author
S. Coindeau
- Function : Author
S. Lay
- Function : Author
T. Ouled
- Function : Author
C. Guichet
- Function : Author
M. H. Chu
- Function : Author
N. Aubert
- Function : Author
G. Ciatto
- Function : Author
E. Blanquet
- Function : Author
- PersonId : 739157
- IdHAL : elisabeth-blanquet
- ORCID : 0000-0001-6467-9110
- IdRef : 135652669
J.L. Deschanvres
- Function : Author
D. D. Fong
- Function : Author
Hubert Renevier
- Function : Author
- PersonId : 1087904
- IdHAL : hubert-renevier
- ORCID : 0000-0002-2317-9344
- IdRef : 061278920