Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines - Aix-Marseille Université Access content directly
Conference Papers Year : 2016

Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines

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hal-01454833 , version 1 (03-02-2017)

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  • HAL Id : hal-01454833 , version 1

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Y. Ezzaidi, S. Escoubas, G. Gaudeau, D. Benoit, P. Morin, et al.. Evaluating Young’s modulus in silicon nitrides via the refinement of the diffraction pattern from silicon strained by nitride lines. Advanced Metallization, MAM 2016, Mar 2016, Brussels, Belgium. ⟨hal-01454833⟩
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