Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing
Abstract
no abstract
![]() |
William Domingues Vinhas : Connect in order to contact the contributor
https://amu.hal.science/hal-01479265
Submitted on : Tuesday, February 28, 2017-5:08:39 PM
Last modification on : Tuesday, December 5, 2023-6:08:07 PM