Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing - Aix-Marseille Université Access content directly
Journal Articles Journal of Process Control Year : 2016

Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing

Abstract

no abstract
No file

Dates and versions

hal-01479265 , version 1 (28-02-2017)

Identifiers

  • HAL Id : hal-01479265 , version 1

Cite

Thi Bich Lien Nguyen, Mohand Djeziri, Faris Djohor, Bouchra Ananou, Mustapha Ouladsine, et al.. Fault prognosis for batch production based on percentile measure and gamma process: Application to semiconductor manufacturing. Journal of Process Control, 2016, Volume 48 (December 2016), pp.Pages 72-80. ⟨hal-01479265⟩
125 View
0 Download

Share

Gmail Facebook X LinkedIn More