Run To Run control based on categorical output in semiconductor manufacturing - Aix-Marseille Université Access content directly
Conference Papers Year : 2016
No file

Dates and versions

hal-01490125 , version 1 (14-03-2017)

Identifiers

  • HAL Id : hal-01490125 , version 1

Cite

El Mostafa El Adel, Guillaume Graton, Mustapha Ouladsine, Jacques Pinaton. Run To Run control based on categorical output in semiconductor manufacturing. International Conference on Systems and Control, ICSC'2016, 2016, Marrakech, Unknown Region. ⟨hal-01490125⟩
107 View
0 Download

Share

Gmail Facebook X LinkedIn More