Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning - Aix-Marseille Université Access content directly
Conference Papers Year : 2016
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hal-01490128 , version 1 (14-03-2017)

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  • HAL Id : hal-01490128 , version 1

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Mohamed Ali Jebri, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. Virtual Metrology on Semiconductor Manufacturing Based on Just-In-Time Learning. 8th IFAC Conference on Manufacturing Modelling, Management and Control, 2016, Troyes, Unknown Region. ⟨hal-01490128⟩
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