Journal Articles
International Journal of Infrared and Millimeter Waves
Year : 1997
Philippe Torchio : Connect in order to contact the contributor
https://amu.hal.science/hal-01757688
Submitted on : Tuesday, April 3, 2018-7:22:48 PM
Last modification on : Tuesday, December 5, 2023-6:08:07 PM
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Philippe Torchio, Roland Occelli. Detection and mapping of oxygen in silicon wafers by scanning infrared absorption. International Journal of Infrared and Millimeter Waves, 1997, 18 (2), pp.491 - 499. ⟨10.1007/BF02677935⟩. ⟨hal-01757688⟩
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