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Fabrication of nano and microstructures for biophysical applications


The goal of this poster presentation is to give an overview of nanofabrication techniques commonly used for realization of nanostructures in our micro and nanofabrication facilities. We focus on all types of process equipment available in PLANETE, the CINaM clean room, which is a part of a regional technological platform CT PACA. First, we have applied a technique of microbead assisted lithography for fabrication of large area protein nanocluster arrays [1]. These biofunctionalized arrays were used for manipulating and imaging of living cells in order to study their adhesion and migration on nanostructured surfaces [2]. This method of surface patterning can also be applied for more complex studies of cell-cell interactions, where not only protein films but also lipid bilayer dot arrays need to be nanostructured [1]. Second, we have developed technological steps needed for microfabrication of field-effect-transistors using lipid layers as grid dielectrics [3,4]. The sensors based of these transistors exploit unprecedented mechanical and dielectric properties of ultrathin supported lipid monolayers [4].Chemical engineering of lipids allowed us to fabricate selective sensors for biologically important metal ions in solutions in large concentration range [3]. Finally, we will show the fabrication steps necessary for fabrication of high aspect ratio molds of microfluidics. Such types of microcirculation devices have been used for comparative studies of the dynamics of healthy and non-healthy red blood cells by mimicking spleen slits [5]. [1] E. Benard, F. Pi, I. Ozerov, A. Charrier, K. Sengupta, “Ligand Nano-cluster Array in Supported Lipid Bilayer”, J. Vis. Exp. 122, e55060 (2017) [2] F. Pi, P. Dillard, R. Alameddine, E. Benard, A. Wahl, I. Ozerov, A. Charrier, L. Limozin, K. Sengupta, “Size-Tunable Organic Nanodot Arrays: a Versatile Platform for Manipulating and Imaging Cells”, Nano Letters 15, 5178-5184 (2015) [3] T.D. Nguyen, A. Labed, R. El Zein, S. Lavandier, F. Bedu, I. Ozerov, H. Dallaporta, J.-M. Raimundo, A. M. Charrier, “A field effect transistor biosensor with a γ-pyrone derivative engineered lipid-sensing layer for ultrasensitive Fe3+ ion detection with low pH interference”, Biosensors and Bioelectronics 54, 571-577 (2014) [4] A. Kenaan, R. El Zein, V. Kilinc, S. Lamant, J.-M. Raimundo, A. M. Charrier, “Ultrathin Supported Lipid Monolayer with Unprecedented Mechanical and Dielectric Properties”, Adv. Func. Mat. 10.1002/adfm.201801024 (2018) [5] P. Gambhire, S. Atwell, C. Iss, F. Bedu, I. Ozerov, C. Badens, E. Helfer, A. Viallat and A. Charrier, “High aspect ratio sub-micron channels using wet etching: Application to the dynamics of red blood cell transiting through biomimetic splenic slits”, Small 13, 1700967 (2017)
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hal-01873560 , version 1 (13-09-2018)


  • HAL Id : hal-01873560 , version 1


F. Bedu, Igor Ozerov, Kheya Sengupta, Emmanuèle Helfer, Annie Viallat, et al.. Fabrication of nano and microstructures for biophysical applications. Les 10èmes Journées Scientifiques du C'Nano-PACA, Sep 2018, Marseille, France. ⟨hal-01873560⟩
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