A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing - Aix-Marseille Université Access content directly
Conference Papers Year : 2018
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hal-01893409 , version 1 (11-10-2018)

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Taki Eddine Korabi, Guillaume Graton, El Mostafa El Adel, Mustapha Ouladsine, Jacques Pinaton. A Bayesian indicator for Run-to-Run performance assessment in semiconductor manufacturing. 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME), Jul 2018, Prague, France. ⟨10.1109/PRIME.2018.8430365⟩. ⟨hal-01893409⟩
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