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Journal Articles Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces Year : 2002

Atomic structures of Si() surface during silane UHV-CVD

L. Masson
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hal-01969091 , version 1 (03-01-2019)

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  • HAL Id : hal-01969091 , version 1

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L. Masson, F. Thibaudau. Atomic structures of Si() surface during silane UHV-CVD. Surface Science : A Journal Devoted to the Physics and Chemistry of Interfaces, 2002, 504, pp.191-198. ⟨hal-01969091⟩
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