Evaluation of scanning capacitance microscopy sample preparation by focused ion beam - Aix-Marseille Université Access content directly
Journal Articles Microelectronics Reliability Year : 2006
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hal-02044996 , version 1 (21-02-2019)

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  • HAL Id : hal-02044996 , version 1

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N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, Christophe Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨hal-02044996⟩
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