Journal Articles
Microelectronics Reliability
Year : 2006
Christophe Girardeaux : Connect in order to contact the contributor
https://amu.hal.science/hal-02044996
Submitted on : Thursday, February 21, 2019-5:13:36 PM
Last modification on : Wednesday, August 2, 2023-4:40:25 PM
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- HAL Id : hal-02044996 , version 1
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N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, Christophe Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨hal-02044996⟩
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