Optimisation of Fluorinated and Phosphorus acids stream treatment from Microelectronic industry
Abstract
The treatment of fluorinated and phosphorus acid microelectronic stream was studied by physiochemical simulations by ProSimPlus software. The conventional treatment is carry out and new systems are proposed. The precipitations of CaF2, NH4MgPO4.6H2O (Struvite) and Ca5(PO4)3OH (Hydroxyapatite) are involved. Using calcium hydroxide as carbon source and pH regulation for the precipitation of CaF2 can reduce chemical consumption more than 60%. For the Stuvite precipitation, about 2,4 t/d can be recover but the effluent quality at the end is not very clean because 150 mg/L of NH4OH is still present. Finally, the second optimization way allows to recover about 1,6 t/d of Hydroxyapatite but ammonium but be removed.
Domains
Chemical and Process Engineering
Origin : Files produced by the author(s)
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