Atom probe tomography for advanced metallization - Aix-Marseille Université Access content directly
Journal Articles Microelectronic Engineering Year : 2014
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hal-02385332 , version 1 (28-11-2019)

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D. Mangelinck, F. Panciera, K. Hoummada, M. El Kousseifi, C. Perrin, et al.. Atom probe tomography for advanced metallization. Microelectronic Engineering, 2014, 120, pp.19-33. ⟨10.1016/j.mee.2013.12.018⟩. ⟨hal-02385332⟩
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