Investigation of a new method for dopant characterization - Aix-Marseille Université Access content directly
Journal Articles Microelectronics Reliability Year : 2007

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hal-02386183 , version 1 (29-11-2019)

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J. Adrian, N. Rodriguez, F. Essely, G. Haller, C. Grosjean, et al.. Investigation of a new method for dopant characterization. Microelectronics Reliability, 2007, 47 (9-11), pp.1599-1603. ⟨10.1016/j.microrel.2007.07.091⟩. ⟨hal-02386183⟩
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