Evaluation of scanning capacitance microscopy sample preparation by focused ion beam - Aix-Marseille Université Access content directly
Journal Articles Microelectronics Reliability Year : 2006

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hal-02386240 , version 1 (29-11-2019)

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N. Rodriguez, J. Adrian, C. Grosjean, G. Haller, C. Girardeaux, et al.. Evaluation of scanning capacitance microscopy sample preparation by focused ion beam. Microelectronics Reliability, 2006, 46 (9-11), pp.1554-1557. ⟨10.1016/j.microrel.2006.07.019⟩. ⟨hal-02386240⟩
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