Nanofabrication of optical structures (filters, resonators and sensors)
Résumé
We fabricated and characterized three types of nanostructures for photonic applications. Gold structures were used for light filtering in the infrared spectral region as well as for molecular sensing based on nanoplasmonics. Also, we fabricated silicon nanostructures showing Mie scattering resonances in the visible and near infrared spectral regions using alkaline etching and gold structures as mask. For all structures, we compare the experimental results vs theoretical modeling.