Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films - Aix-Marseille Université Access content directly
Journal Articles Applied Physics Letters Year : 2010

Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films

B. Rezgui
  • Function : Author
A. Sibai
  • Function : Author
T. Nychyporuk
M. Lemiti
  • Function : Author
G. Bremond
  • Function : Author
D. Maestre
  • Function : Author

Dates and versions

hal-03350227 , version 1 (21-09-2021)

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B. Rezgui, A. Sibai, T. Nychyporuk, M. Lemiti, G. Bremond, et al.. Effect of total pressure on the formation and size evolution of silicon quantum dots in silicon nitride films. Applied Physics Letters, 2010, 96 (18), pp.183105. ⟨10.1063/1.3427386⟩. ⟨hal-03350227⟩
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