Minority carrier lifetime and metallic-impurity mapping in silicon wafers - Aix-Marseille Université Access content directly
Journal Articles Materials Science in Semiconductor Processing Year : 2001

Minority carrier lifetime and metallic-impurity mapping in silicon wafers

Dates and versions

hal-03350313 , version 1 (21-09-2021)

Identifiers

Cite

O. Palais, S. Martinuzzi, J.J. Simon. Minority carrier lifetime and metallic-impurity mapping in silicon wafers. Materials Science in Semiconductor Processing, 2001, 4 (1-3), pp.27-29. ⟨10.1016/S1369-8001(00)00162-1⟩. ⟨hal-03350313⟩
21 View
0 Download

Altmetric

Share

Gmail Facebook X LinkedIn More