Field ionization intensity used to measure local pressure in gas flows
Résumé
A coaxial ion source produces an ion beam via field effect in a gas flow through a coaxial microchannel structure. Measuring the intensity of ion emission under an electric voltage condition reveals the pressure at the tip of the coaxial structure, where ionization occurs. The spatial resolution of the measurements is defined by the volume in which the position of the tip is inscribed, here estimated as a cube with an edge of 10 μm.The pressure at the tip is also obtained analytically as a function of the throughput through the coaxial structure. The theoretical and the experimental pressure values reported in the present work agree, taking into account the geometric uncertainties of the coaxial structure itself.
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