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https://amu.hal.science/hal-01452436
Submitted on : Wednesday, February 1, 2017-9:46:11 PM
Last modification on : Friday, March 24, 2023-2:53:03 PM
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- HAL Id : hal-01452436 , version 1
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P.S. Pokam Kuisseu, T. Pingault, E. Ntsoenzok, G. Regula, F. Mazen, et al.. Wafering of ultra-thin silicon substrates by MeV hydrogen implantation: effects of fluence and energy. Spring E-MRS Conference, May 2016, Lille, France. ⟨hal-01452436⟩
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