Wafering of ultra-thin silicon substrates by MeV hydrogen implantation: effects of fluence and energy - Aix-Marseille Université Access content directly
Conference Papers Year : 2016

Wafering of ultra-thin silicon substrates by MeV hydrogen implantation: effects of fluence and energy

P.S. Pokam Kuisseu
  • Function : Author
T. Pingault
  • Function : Author
E. Ntsoenzok
  • Function : Author
F. Mazen
  • Function : Author
A. Sauldubois
  • Function : Author
Caroline Andreazza
  • Function : Author
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Dates and versions

hal-01452436 , version 1 (01-02-2017)

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  • HAL Id : hal-01452436 , version 1

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P.S. Pokam Kuisseu, T. Pingault, E. Ntsoenzok, G. Regula, F. Mazen, et al.. Wafering of ultra-thin silicon substrates by MeV hydrogen implantation: effects of fluence and energy. Spring E-MRS Conference, May 2016, Lille, France. ⟨hal-01452436⟩
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