In-volume structuring of silicon using picosecond laser pulses - Aix-Marseille Université Accéder directement au contenu
Article Dans Une Revue Applied physics. A, Materials science & processing Année : 2018

In-volume structuring of silicon using picosecond laser pulses

H. Kämmer
  • Fonction : Auteur
G. G Matthäus
  • Fonction : Auteur
S. S Nolte
  • Fonction : Auteur
M. M Chanal
  • Fonction : Auteur

Résumé

We have demonstrated for the first time the permanent local modification of the bulk of silicon by repeated illumination with infrared (1.55 μm) picosecond pulses. Furthermore, we evaluated the characteristics of inscribing permanent modifications in the bulk material for different pulse durations from 0.8 to 10 ps in terms of their reproducibility and controllability of their morphology. Our results are based on a simple experimental setup that demonstrates the possibility of using picosecond pulses for the local modification of bulk silicon as a potential alternative to more complex irradiation strategies required for femtosecond pulse processing.
Fichier principal
Vignette du fichier
Kämmer et al. - 2018 - In-volume structuring of silicon using picosecond laser pulses_HAL.pdf (972.77 Ko) Télécharger le fichier
Loading...

Dates et versions

hal-01917813 , version 1 (09-11-2018)

Licence

Paternité

Identifiants

Citer

H. Kämmer, G. G Matthäus, S. S Nolte, M. M Chanal, O. Uteza, et al.. In-volume structuring of silicon using picosecond laser pulses. Applied physics. A, Materials science & processing, 2018, 124 (4), ⟨10.1007/s00339-018-1715-1⟩. ⟨hal-01917813⟩
52 Consultations
138 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More