Tungsten diffusion in silicon - Aix-Marseille Université Access content directly
Journal Articles Journal of Applied Physics Year : 2014
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hal-02385347 , version 1 (28-11-2019)

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A. de Luca, A. Portavoce, M. Texier, C. Grosjean, N. Burle, et al.. Tungsten diffusion in silicon. Journal of Applied Physics, 2014, 115 (1), pp.013501. ⟨10.1063/1.4859455⟩. ⟨hal-02385347⟩
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