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Journal Articles Materials Science in Semiconductor Processing Year : 2006

Scanning techniques applied to the characterisation of P and N type multicrystalline silicon

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hal-03350274 , version 1 (21-09-2021)

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S. Martinuzzi, O. Palais, S. Ostapenko. Scanning techniques applied to the characterisation of P and N type multicrystalline silicon. Materials Science in Semiconductor Processing, 2006, 9 (1-3), pp.230-235. ⟨10.1016/j.mssp.2006.01.079⟩. ⟨hal-03350274⟩
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