Journal Articles
Materials Science in Semiconductor Processing
Year : 2006
Olivier Palais : Connect in order to contact the contributor
https://amu.hal.science/hal-03350274
Submitted on : Tuesday, September 21, 2021-11:05:08 AM
Last modification on : Tuesday, December 5, 2023-6:08:07 PM
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S. Martinuzzi, O. Palais, S. Ostapenko. Scanning techniques applied to the characterisation of P and N type multicrystalline silicon. Materials Science in Semiconductor Processing, 2006, 9 (1-3), pp.230-235. ⟨10.1016/j.mssp.2006.01.079⟩. ⟨hal-03350274⟩
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